Measuring thickness of thin metallic films with the use of laser probing technique

Abstract

Proposed and practically carried out поп-contact method of measuring thickness of thin metallic films. The recommended range of the thickness measured is from 100A to 1500A. The method is based on probing by a laser beam periodic rectangular patterns, formed on a small portion of the film being studied and coated with a secondary metallic layer.

КиберЛенинка: https://cyberleninka.ru/article/n/measuring-thickness-of-thin-metallic-films-with-the-use-of-laser-probing-technique